Maintenance and upgrades
Keeping legacy semiconductor tools running when parts go obsolete
Old controllers, discontinued boards and lost manuals retire most legacy tools. How to plan spares, backups and retrofits before a failure forces it.
Photo or muted video of a refurbished tool in a cleanroom · 16:9
Refurbished semiconductor equipment
Process tools, inspected and ready for your cleanroom
Lithography, etch, deposition and metrology tools for universities, pilot lines and small fabs, refurbished, upgraded and serviced by our engineers. Every tool ships with an inspection report or, for As-is tools, photos and the known history.
We refurbish and service tools from
Names are trademarks of their owners. SemiXperts is independent and not affiliated with any manufacturer.
Equipment
Tools we refurbish and service
From lithography to back-end packaging, for 50 to 200 mm wafers.
Oxford Instruments
Plasmalab System 100 ICP-RIE etch system
200 mm (8 in) · Late 1990s–2010s
Price on requestView tool
Kurt J. Lesker
PVD 75 sputter and evaporation system
150 mm (6 in) · 2000s–2020s
Price on requestView tool
How it works
From enquiry to your loading dock
Tell us the process
You share the process, wafer size and facilities; we shortlist tools that fit.
Inspection and report
Where it is safe to do so, we power up each tool and check it against its original specification.
Refurbishment
We replace worn parts, clean the chamber and recalibrate to the scope you approved.
Crating and installation
We crate the tool for export, ship it and hook it up at your loading dock.
- Quote turnaround on listed tools
- 48h
- Warranty on refurbished and certified tools
- 6mo
- Wafer sizes we work with
- 50–200mm
- Process areas, from lithography to back-end
- 8
Warranty and turnaround apply to tools sold by SemiXperts; the warranty period is confirmed in each quote.
Services
Keep older tools running, and make them better
Refurbishment
Rebuild used tools to their original specification, with a written scope and a test report.
Refurbishment servicesUpgrades
Retrofit older tools with new controls, light sources, pumps, wafer sizes or endpoint detection.
Upgrades servicesMaintenance
Keep older process tools running with planned maintenance, repair, calibration and parts.
Maintenance servicesInstallation
Moving a process tool from one cleanroom to another, and getting it running at the new site.
Installation servicesGuides
Before you buy
Process know-how
Ellipsometer or reflectometer: choosing a film thickness tool
Reflectometers measure routine films quickly and cheaply. Ellipsometers handle very thin films, unknown materials and stacks. How to choose for your lab.
Logistics and compliance
Export controls and used semiconductor equipment, an overview
Why a second-hand etcher or furnace can need an export licence, which rules usually apply in the EU, and what buyers and sellers should prepare before shipping.
Who we work with
Universities and research labs
Single-wafer tools sized for teaching and research cleanrooms, with training for new users.
Tools for researchPilot lines and small fabs
Production-proven 150 and 200 mm tools, upgrades and spare parts that keep older lines running.
Tools for pilot linesSell your equipment
Send photos and the service history of a tool you no longer use; we make an offer or sell it for you.
Get an offer